A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor
نویسندگان
چکیده
منابع مشابه
A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor
The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin f...
متن کاملCharacterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Fabrice F.C. Duval a,∗, Stephen A. Wilson a, Graham Ensell b, Nicolas M.P. Evanno c, Markys G. Cain d, Roger W. Whatmore a,1 a School of Industrial and Manufacturing Science, Cranfield University, Bedfordshire MK43 0AL, UK b INNOS Limited, Mountbatten Building, Highfield, Southampton, Hampshire SO17 1BJ, UK c Rolls-Royce Plc, Strategic Research Centre, Sina-28, P.O. Box 31, Derby DE24 8BJ, UK d...
متن کاملModeling and analysis of a three-component piezoelectric force sensor
This paper presents a mathematical model for the vibration analysis of a three-component piezoelectric force sensor. The cubic theory of weakly nonlinear electroelasticity is applied to the model for describing the electromechanical coupling effect in the piezoelectric sensing elements which operate in thickness-shear and thickness-stretch vibration modes. Hamilton's principle is used to derive...
متن کاملmodeling and analysis of a three-component piezoelectric force sensor
this paper presents a mathematical model for the vibration analysis of a three-component piezoelectric force sensor. the cubic theory of weakly nonlinear electroelasticity is applied to the model for describing the electromechanical coupling effect in the piezoelectric sensing elements which operate in thickness-shear and thickness-stretch vibration modes. hamilton's principle is used to d...
متن کاملMEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out
We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...
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ژورنال
عنوان ژورنال: Sensors
سال: 2014
ISSN: 1424-8220
DOI: 10.3390/s141222199